<p>Number of study places for Open University students: 5</p>


Open University

Tampere

Introduction to Microsystem Technology, Lectures

<p>Lectures and calculation exercise recommended. Visitation lectures gives bonus points. Obligatory: Lab exercise, Demo sessions, Seminar.</p>


<p>Contact information<br>Email: <span class="spamspan"><span class="u">open.studies.tau</span> [at] <span class="d">tuni.fi</span></span><br>Phone: 0294 520 200</p><p>More information concerning Open University studies<br><a href="https://www.tuni.fi/open-university">tuni.fi/open-university</a></p>

Intermediate studies

Faculty of Medicine and Health Technology

Technology and Natural Sciences

<p>Apply for Open University studies by using the following links:</p><p><ul><li><a href="https://tau-avoin.ilmoittaudu.fi/lobby/?realization=J-otm-30d2a7bb-fe3e-4943-ae5e-415a444e8dac_2023-tampere-BBT031" target="_blank">BBT.031 Introduction to Microsystem Technology, lectures, Tampere</a></li></ul></p><p>You can find a link to the Open University Admissions service and application instructions on the <a href="https://www.tuni.fi/en/study-with-us/open-higher-education-studies/open-university/applying-open-university">Applying to Open University studies</a> page.</p><p>Some of the studies require prior studies. For example, studying intermediate studies may require some completed basic studies. These are described on the Information about studies tab of the study unit under prior requirements.</p><p>When you have been admitted to the studies, you must enrol separately via the Sisu information system for the implementation of the unit of study and, for example if set, for a practise group of your choice. You will receive instructions on how to do this by e-mail after you have confirmed your acceptance of the study place by paying the required fee.</p>

English

Hervanta Campus

Contact teaching

<p>Look information at <a href="https://www.tuni.fi/en/study-with-us/open-higher-education-studies/open-university/applying-open-university">Applying to Open University studies</a>.</p>

<h5>Core content</h5><ul><li>Definition of microsystem technology, understanding of the potential and challenges related to microsystem technology, ability to name the main applications.</li><li>Definition of scaling effect, its origin and main effects at microscale.</li><li>Microscopy, especially optical microscopy, scanning electron microscopy and atomic force microscopy, basic operating principles. </li><li>Skills to operate in the clean room facilities under supervision.</li><li>Microactuators, especially piezoelectric actuators, shape memory alloy actuators, thermal actuators and electrostatic actuators, basic operating principles.</li><li>Microsensors, especially pressure, acceleration and flow sensors. Structure and basic operation principles. </li></ul><h5>Complementary knowledge</h5><ul><li>Basic understanding of dimensional analysis and and its utilization in microsystem technology.</li><li>Comparing benefits and limitations of different microscopy methods. </li><li>Profilometers in characterization. </li><li>Comparing the implementation and performance of different actuator types. </li><li>Comparing the implementation and &nbsp;performance of different sensor types. </li></ul><h5>Specialist knowledge</h5><ul><li>Analyse and compare the differencies in scaling between different physical phenomena.</li><li>Selection of microscopy technique according to the application.</li><li>Other characterization methods. </li><li>Material-related phenomena of microactuators. Microrobotics as an application field of microactuators. </li><li>Sensor fabrication techniques.</li></ul>

<h2>Common</h2><h3>Lecture: </h3><p>29.08.2023 12:00 - 14:00, TAU S&#228;hk&#246;talo SM207 opetustila (30)<br>05.09.2023 12:00 - 14:00, TAU S&#228;hk&#246;talo SM207 opetustila (30)<br>14.09.2023 08:00 - 10:00, TAU Rakennustalo RD203 opetustila (60)<br>21.09.2023 08:00 - 10:00, TAU Rakennustalo RD203 opetustila (60)<br>28.09.2023 08:00 - 10:00, TAU Rakennustalo RD203 opetustila (60)<br>05.10.2023 08:00 - 10:00, TAU Rakennustalo RD203 opetustila (60)<br>12.10.2023 08:00 - 10:00, TAU Rakennustalo RD203 opetustila (60)<br>26.10.2023 08:00 - 10:00, TAU Rakennustalo RD203 opetustila (60)<br>02.11.2023 08:00 - 10:00, TAU Rakennustalo RD203 opetustila (60)<br>09.11.2023 08:00 - 10:00, TAU Rakennustalo RD203 opetustila (60)<br>16.11.2023 08:00 - 10:00, TAU Rakennustalo RD203 opetustila (60)<br>23.11.2023 08:00 - 10:00, TAU Rakennustalo RD203 opetustila (60)<br>30.11.2023 08:00 - 10:00, TAU Rakennustalo RD203 opetustila (60)<br>07.12.2023 08:00 - 10:00, TAU Rakennustalo RD203 opetustila (60)<br></p><h3>Seminar: </h3><p>20.11.2023 10:00 - 12:00, TAU Tietotalo TC133 opetustila (28)<br>20.11.2023 14:00 - 16:00, TAU Tietotalo TB216 opetustila (32)<br>28.11.2023 08:00 - 10:00, TAU Rakennustalo RD203 opetustila (60)<br>29.11.2023 14:00 - 16:00, TAU Rakennustalo RD203 opetustila (60)<br>04.12.2023 10:00 - 12:00, TAU Festia FA128 Kappelisali (30)<br></p>

<p>After the course, the student is able to:<br></p><ul><li>Define microsystem technology and name its main applications</li></ul><ul><li>Identify different microscopy techniques, explain their working principles and name the benefits and drawbacks</li></ul><ul><li>Define scaling effect, knows its consequences and how analyse its influences on different phenomena</li></ul><ul><li>Name the most important microfabrication methods and know their strengths and limitations</li></ul><ul><li>Name<br> capabilities and state-of-the-art of selected microsensors, explain <br>their working principles and name their benefits and drawbacks </li></ul><ul><li>Name<br> capabilities and state-of-the-art of microactuators, explain their <br>working principles and name their benefits and drawbacks </li></ul>Work life skills: <br><ul><li>Give presentation in English </li></ul><ul><li>Perform scientific literature search</li></ul>

<h2>Prerequisites</h2><p>No prerequisities</p>

<ul><li>AYBIODIVO Open University Route, Biotechnology and Biomedical Engineering, MSc</li><li>AYBSEMSCVO Open University Route, Biomedical Sciences and Engineering, MSc</li></ul>

<h5>Material</h5><ul><li>Type:&#160;Summary of lectures</li><li>Name:&#160;Introduction to Microsystem Technology </li><li>Author:&#160;Pasi Kallio et al</li><li>Exam material:&#160;Yes</li><li>Language:&#160;English</li></ul><h5>Material</h5><ul><li>Type:&#160;Lecture slides</li><li>Name:&#160;Lecture slides</li><li>Author:&#160; &nbsp; &nbsp; &nbsp;Lecturers </li><li>Exam material:&#160;Yes</li><li>Language:&#160;English</li></ul><p>Material available in Moodle<br></p>

Introduction to Microsystem Technology, Lectures

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Introduction to Microsystem Technology, 5 cr

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