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Microfabrication facility

Tampere University
Hervanta Campus
AddressKorkeakoulunkatu 3, 33720 Tampere
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Microfabrication specimen


Microfabrication facility is located in S-building at the Hervanta campus of the Tampere University. The facility is primarily intended for fabrication of microsensor prototypes and microfluidic structures, as well as for various characterizations in micro- and nanoscale.

However, many devices can be used in manufacturing, modifying or characterizing also samples and substrates used in biomedical applications.