Microfabrication facility

Equipment

Equipment in SI Cleanroom

• 270 m2 shared cleanroom space with Photonics laboratory of TUT
• Class ISO 6 (US 1000) in three fingers, ISO 5 (US 100) in lithography finger
• Fabrication of microsensor prototypes and microfluidic structures

SCT Orion series BC-3000 e-beam coater (“metallization device”)
Fabrication of thin (10-1000 nm) metal and insulator films. Equipped with Meissner trap and Ion Source (Ar, N2, O2) for sputter etching and reactive deposition.
Evaporation materials: Ag, Al, Au, Cr, Cu, ITO, Mg, MgO, Pt, SiO2, Ti, etc.

Advanced Vacuum Vision 320 Mk II RIE (reactive ion etcher)
Dry etching and plasma treatments
Gases: CF4, CHF3, SF6, Ar, O2

Bruker Dektak XT stylus profilometer
Measurements of micro- and nanostructure dimensions in 2D and 3D

Heidelberg Instruments µPG501 maskless exposure device
Fabrication of chrome masks and micropatterning without physical mask. Resolution 1-2 µm.

OAI 500 mask aligner
1-2 µm resolution

Laurell WS-650Hzb-23NPPB spin coater
Spinning photoresist or polymers on substrates

Zeiss Axio Imager.A1m upside microscope with camera
Max 500x magnification, DIC prism

 

Other Equipment

Agilent 4396B 1.8 GHz circuit analyzer
Circuit-, spectrum- and impedance analysis

Attension Theta Lite optical goniometer (Biolin Scientific AB, Sweden)
For contact angle measurements

Automatic film applicator coater (ZAA 2300 Zehntner)
Motorized coater equipped with a heated stage with a vacuum for substrate attachment. Wire-bars and applicator available for coating.

BD-20ACV Laboratory Corona Treater 230V corona discharge device
Surface treatments (e.g. for treating PDMS for bonding)

Binder CB150 incubator
Test environment for structures for bio-applications
37 °C, 5% CO2

Binder FD53 oven
Max. +300C

Bionavis SPR-Navi 210A-3L multiparametric SPR-device
2 flow cells
4 lasers: 670 nm and 785 nm in both flow cells (one will be changed to 980 nm)
Angle range: 40-78
Autosampler for 5 (6) samples
Electrochemical cuvette included

Bioprinter (Nordson EFD)
Dispenser-type three-head printer for solution phase materials, e.g. for cells in the media or hydrogel. Printer robot model is Nordson EFD E4V and it is equipped with one Ultimus V and two Performus V dispensers. Printer is equipped with a temperature controlled stage with Lauda liduid circulation cooler system.

Cleanroom (old)
22 m2, class 10 000
To be dedicated for cell culturing work

Direct exposure device
Micropatterning without physical mask
Resolution 10 µm

Fan Assisted Oven (Memmert UF55)
Convection oven for baking/annealing at temperatures up to 300 °C.

Finetech Fineplacer pico-MA microstamping device
Transferring protein patterns etc. accurately (5 µm) on substrate

Freeze dryer (Epsilon 2-4 LSCplus)
Pilot scale benchtop freeze dryer with a heat-controlled shelf in the chamber and external bottle-plugs. Epsilon 2-4 LSCplus unit has an internal ice condenser temperature with a minimum of -85°C and is available with one shelf with 0.11 m2 useable surface area and four bottle-plug positions.

Ivium Iviumstat potentiostat
Impedance and CV measurements and electroplating etc.

Kojair BW-130 silverline class2 biosafety cabinet

Kojair VKV-15FE fume hood

Laurell WS-400A-6NPP/Lite spinner
Only for spinning thin layers of PDMS elastomer

Mechanical shaker and force measurement setup
A mechanical shaker (Brüel & Kjaer Mini-Shaker Type 4810) for applying sinusoidal force e.g. on a force sensors elements. Equipped with static and dynamic for sensors. Connected to a measurement card with charge amplifier.

Microfluidic test bench
LabVIEW based softwares, imaging with motorized zoom and focus, different kinds of pumps, dispensers, pressure controllers, and various sensors for flow (gas and liquid), pressure (in gas or liquid media), and temperature.

Micromanipulation platform
Manipulation of micro-objects e.g. fiber-like objects (paper fibers) and living cells

Microrobotic characterization and testing systems for microscale materials
Measurement of mechanical properties, such as axial stiffness, bending stiffness, and interfacial strength, of microscale materials (fibres, membranes, hydrogels).
Handling of microscale parts and biological objects.

Millipore Direct-Q 3 deionized water system

MTI EC400 dicing saw
Cutting of glass, silicon etc.

Nikon TS100-S inverted fluorescence (FITC, T-red) microscope (xyz-controlled)
Mainly for microfluidics and structure characterization but also for biological samples

Optical microscope (Primotech)
Contains top and bottom lighting options. Magnification from x5 to x100. Equipped with polarizer and camera for image capture.

Park Systems XE-100 AFM (atomic force microscope)
Nanocharacterization of dry and wet samples (including cells)

Precisa XR 205SM-DR precision scale
max. 210 g; resolution 0.01 mg

SMT M03TE-2V gas mixer
Mixing gasses (N2, O2 and CO2)
N2 fixed, O2 and CO2 adjustable 0-20%

SPR-device (surface plasmon resonance)
Custom device for studying binding reactions and surfaces

Stable Microsystems TA.XTplus texture analyzer
For force-distance measurements e.g. compression, bending, tension, and adhesion
0.5 kg and 10 kg load cells

Sutter Instruments P-2000 capillary puller
Pulling capillaries with your own parameters

TPT HB05 wire bonder
Bonding microchips on circuit board etc.

Vacuum tube furnace for pyrolysis
Vertical quartz tube furnace (oven). Temperatures at least up to 800 C. Vacuum pump connected to a quartz tube (no gas inlets).

Victor2 1420 multilabel reader (Wallac, Perkin-Elmer)
Time resolved fluorescence wellplate reader
Filters for europium chelates (Ex: ~340 nm, Em: ~615 nm)

Vötsch VT4021 temperature chamber
-40°C…+180 °C

Wyko NT1100 optical profilometer
3D micro- and nanocharacterization
Located at Photonics Laboratory

Zeiss Axio Observer.Z1 inverted, semi-automated optical microscope with camera
Max. 200x magnification; Contrast Methods: Brightfield, Darkfield, Phase Contrast, DIC, Fluorescence
(DAPI, GFP, mcherry etc.); Special Imaging Capabilities: Z-Stack, Tile Imaging

3D-printer (Prusa i3)
Contains four printing heads for printing different plastic materials simultaneously.