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Microfabrication facility

Microfabrication facility

Microfabrication facility


Microfabrication facility is located in S-building at the Hervanta campus of the Tampere University. The facility is primarily intended for fabrication of microsensor prototypes and microfluidic structures, as well as for various characterizations in micro- and nanoscale.

However, many devices can be used in manufacturing, modifying or characterizing also samples and substrates used in biomedical applications.


All the users of the Microfabrication facility services are obligated to acknowledge the facility in publications:

“The authors acknowledge Tampere facility of Microfabrication for their service.”