Microsensors, 5 op

Core content

• Principles and classification of sensors, different signal energies, integrated sensors, design principles of microsensors.
• Sensor materials, sensor fabrication technologies, thin and thick film manufacturing methods, silicon processing techniques, principles of photolithography, silicon micromechanics, encapsulation of microsensors.
• Temperature sensors, Seebeck's phenomenon in metals and semiconductors, thermistors, diode and transistor as temperature sensor, radiation sensors, photoresistor, photodiode, pyroelectric sensors, pressure sensors.
• Inertia sensors, acceleration sensors, gyro, flow sensors, magnetic sensors(Hall-sensor, magneto-resistive sensor), chemical sensors, ioniselective sensors, gas sensors.
• Eapplications of microsensors, examples of commercial sensors.

Complementary knowledge

• Physical and chemical phenomena in solid materials, origin of noise and different noise types.
• Lattice structure and properties of silicon, principles of the processing instruments, components of microelectronics (diode, transistor, FET).
• Interaction of radiation with materia.
• Microfluidistics.
• Packaging methods of microelectronics.

Specialist knowledge

• Modelling software (Comsol Multiphysics)