Hervanta Campus

Tampere

<h3>Core content</h3><ul><li>Definition of microsystem technology, understanding of the potential and challenges related to microsystem technology, ability to name the main applications.</li><li>Definition of scaling effect, its origin and main effects at microscale.</li><li>Microscopy, especially optical microscopy, scanning electron microscopy and atomic force microscopy, basic operating principles. </li><li>Skills to operate in the clean room facilities under supervision.</li><li>Microactuators, especially piezoelectric actuators, shape memory alloy actuators, thermal actuators and electrostatic actuators, basic operating principles.</li><li>Microsensors, especially pressure, acceleration and flow sensors. Structure and basic operation principles. </li></ul><h3>Complementary knowledge</h3><ul><li>Basic understanding of dimensional analysis and and its utilization in microsystem technology.</li><li>Comparing benefits and limitations of different microscopy methods. </li><li>Profilometers in characterization. </li><li>Comparing the implementation and performance of different actuator types. </li><li>Comparing the implementation and  performance of different sensor types. </li></ul><h3>Specialist knowledge</h3><ul><li>Analyse and compare the differencies in scaling between different physical phenomena.</li><li>Selection of microscopy technique according to the application.</li><li>Other characterization methods. </li><li>Material-related phenomena of microactuators. Microrobotics as an application field of microactuators. </li><li>Sensor fabrication techniques.</li></ul>

Open University

Lectures and calculation exercise recommended. Visitation lectures give bonus points. Obligatory: Lab exercise and Seminar.Study methods:<ul><li>Lectures (No recordings)</li><li>Clean room laboratory exercise and report</li><li>Seminar: Literature review and 15 min seminar presentation</li><li>Working as an opponent in seminar</li></ul>

Faculty of Medicine and Health Technology

English

<p>After the course, the student is able to:<br></p><ul><li>Define microsystem technology and name its main applications</li></ul><ul><li>Identify different microscopy techniques, explain their working principles and name the benefits and drawbacks</li></ul><ul><li>Define scaling effect, knows its consequences and how analyse its influences on different phenomena</li></ul><ul><li>Name the most important microfabrication methods and know their strengths and limitations</li></ul><ul><li>Name
 capabilities and state-of-the-art of selected microsensors, explain 
their working principles and name their benefits and drawbacks </li></ul><ul><li>Name
 capabilities and state-of-the-art of microactuators, explain their 
working principles and name their benefits and drawbacks </li></ul>Work life skills: <br><ul><li>Give presentation in English </li></ul><ul><li>Perform scientific literature search</li></ul>

<h3>Lectures</h3><h4>Lecture: </h4><p>27.08.2025 12.00 - 27.08.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br>03.09.2025 12.00 - 03.09.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br>10.09.2025 12.00 - 10.09.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br>17.09.2025 12.00 - 17.09.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br>24.09.2025 12.00 - 24.09.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br>01.10.2025 12.00 - 01.10.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br>08.10.2025 12.00 - 08.10.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br>22.10.2025 12.00 - 22.10.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br>29.10.2025 12.00 - 29.10.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br>05.11.2025 12.00 - 05.11.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br>12.11.2025 12.00 - 12.11.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br>19.11.2025 12.00 - 19.11.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br>26.11.2025 12.00 - 26.11.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br>03.12.2025 12.00 - 03.12.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br></p><h4>Seminar: </h4><p>10.11.2025 10.00 - 10.11.2025 12.00, TAU Tietotalo TB206 opetustila (25)<br>11.11.2025 12.00 - 11.11.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br>17.11.2025 10.00 - 17.11.2025 12.00, TAU Tietotalo TB206 opetustila (25)<br>18.11.2025 12.00 - 18.11.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br>24.11.2025 10.00 - 24.11.2025 12.00, TAU Tietotalo TB206 opetustila (25)<br>25.11.2025 12.00 - 25.11.2025 14.00, TAU Tietotalo TB206 opetustila (25)<br></p><h4>null</h4><p>08.12.2025 13.00 - 08.12.2025 16.00, TAU Festia FA044 Iso sali (480)<br></p>

TUNI Moodle: BBT.031-2025-2026-1 Introduction to Microsystem Technology (Lectures)

Lectures, autumn 2025

Lectures and calculation exercise recommended. Visitation lectures give bonus points. Obligatory: Lab exercise and Seminar. Study methods:<ul><li>Lectures (No recordings)</li><li>Clean room laboratory exercise and report</li><li>Seminar: Literature review and 15 min seminar presentation</li><li>Working as an opponent in seminar</li></ul><p><a href="https://www.tuni.fi/en/study-with-us/open-higher-education-studies/open-university" target="_blank" rel="noopener noreferrer">More information about studying at the Open University</a>.</p>

Contact teaching

<h5>Lectures</h5><p>Lectures (No recordings)</p><p>Clean room laboratory exercise and report</p><p>Seminar:</p><p>Literature review and 15 min seminar presentation</p><p>Working as an opponent in seminar</p>

Technology and Natural Sciences

Intermediate studies

<h3>Material</h3><ul><li>Type: Summary of lectures</li><li>Name: Introduction to Microsystem Technology </li><li>Author: Pasi Kallio et al</li><li>Exam material: Yes</li><li>Language: English</li></ul><h3>Material</h3><ul><li>Type: Lecture slides</li><li>Name: Lecture slides</li><li>Author:  	Lecturers </li><li>Exam material: Yes</li><li>Language: English</li></ul><p>Material available in Moodle<br></p>

BBT.031 Introduction to Microsystem Technology, 5 cr

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