76527
INTRODUCTION TO MICROSYSTEM TECHNOLOGY,
INTRODUCTION TO MICROSYSTEM TECHNOLOGY, 3 ov
Lecturer info
Research Engineer PASI KALLIO (pasi.kallio@tut.fi, Room Sd104)
Lectures and exercises:
Lectures 28 h. Seminars.
Weekly teaching / period |
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Lectures (h): |
2+ |
2 |
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Exercises (h): |
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Course objectives
The objective of the course is to give an overview of microsystem technology and its applications. After the course, a student should be aware of the capabilities and state-of-the-art of microsystem technology. The course suits especially well for students who aim for R&D tasks.
Content of the course
The course covers microfabrication technologies (silicon microfabrication, LIGA, material deposit and material removal methods), active materials (piezoelectricity, magneto and electrostriction, shape memory effect), microphysics and scaling, microsensors, microactuators, MEMS, microfluidics, microrobotics and application examples.
Requirements
Final examination, a seminar work (including oral presentation and written report) and a laboratory work.
Literature
Lecture notes. Fatikow & Rembold: Microsystem Technology and Microrobotics, Springer, 1997 (partly).
Information on prerequisites
None. But the student is assumed to have willingness to cross engineering disciplines. As an introductory course, the course suits well for students having different backgrounds: automation, electrical, mechanical and environmental engineering, materials and computer science.
Notes
Lectures are given in English. The course is recommended to be taken in the third or fourth year of studies.