76527
INTRODUCTION TO MICROSYSTEM TECHNOLOGY,
INTRODUCTION TO MICROSYSTEM TECHNOLOGY, 3 ov
Lecturer info
Senior Research Engineer PASI KALLIO (pasi.kallio@tut.fi, Room Sd104)
Lectures and exercises:
Lectures 28 h. Seminars.
Weekly teaching / period |
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Lectures (h): |
2+ |
2 |
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Exercises (h): |
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Course objectives
The objective of the course is to give an overview of microsystem technology and its applications. After the course, a student should be aware of the capabilities and state-of-the-art of MEMS and microsystem technology. The course suits especially well for students who aim for R&D tasks.
Content of the course
The course gives an overview of the following aspects of microsystems: microfabrication technologies (silicon microfabrication, LIGA, material deposit and material removal methods, bonding technologies), microphysics and scaling, microsensors, microactuators and active materials, microfluidics, microrobotics and application examples.
Requirements
Final examination and a seminar work (including an oral presentation and a written report).
Literature
Lecture notes (in Finnish). Fatikow & Rembold: Microsystem Technology and Microrobotics, Springer, 1997 (partly).
Information on prerequisites
None. But the student is assumed to have willingness to cross engineering disciplines. As an introductory course, the course suits well for students having different backgrounds: automation, electrical, mechanical and environmental engineering, materials and computer science.
Notes
The course is recommended to be taken in the third or fourth year of studies.